Vertical interconnection structure and methods

ABSTRACT

Interconnection structures for integrated circuits have first cells disposed in a first plane, at least second cells disposed in at least a second plane parallel to the first plane, and vertical interconnections disposed for connecting conductors in the first plane with conductors in the second plane, at least some of the vertical interconnections initially incorporating antifuses. The antifuses may be disposed over conductors that are disposed on a base substrate. The antifuses are selectively fused to prepare the integrated circuit for normal operation. Methods for fabricating and using such vertical interconnection structures are disclosed.

RELATED APPLICATIONS

[0001] This application is related to copending and commonly-owned U.S.patent application Ser. No. 10/001,740 filed Oct. 31, 2001 and Ser. No.10/051,677 filed Jan. 16, 2002, and to copending and commonly-owned U.S.patent application Ser. Nos. 10/115,744, 10/115,750, 10/115,763,10/116,213, and 10/116,497, each filed Apr. 2, 2002.

FIELD OF THE INVENTION

[0002] This application relates to interconnection structures especiallyuseful in semiconductor devices, such as integrated circuits and memorydevices, and relates to methods for fabricating and using suchstructures.

BACKGROUND ART

[0003] Integrated circuits including arrays of memory nodes or logicgates have increased steadily in density. Such integrated circuits haveincluded dynamic random access memory (DRAM) devices, static randomaccess memory (SRAM) devices, programmable read-only memory (PROM)integrated circuits, electrically erasable programmable read-only memory(EEPROM) integrated circuits, write-once read-many (WORM) memorydevices, and logic devices such as programmable logic array (PLA)integrated circuits, among others. Integrated circuits having arrays ofdevices, gates, or memory nodes disposed on multiple levels require“vertical” interconnections or “pillars” to interconnect devices, gates,or memory nodes on one level with other devices, gates, or nodes onother levels. In this context, the term “vertical” differs from itseveryday connotation in that it does not refer to the direction ofgravity. Throughout this specification, the drawings, and the appendedclaims, the term “vertical” refers to a direction generallyperpendicular to a substrate or base plane of an integrated circuit.Also, the term “pillar” referring to an interconnection and the term“vertical interconnection” are used interchangeably to mean aninterconnection communicating between different layers of an integratedcircuit, regardless of the spatial orientation of those differentlayers. Integrated circuits herein include not only monolithicintegrated circuits, but also hybrid integrated circuits and multi-layeror “stacked” modules. The term “cell” herein refers to a functionalelement of an array, such as a memory node, a logic gate, a switchingdevice, a field-effect device, or a semiconductor device. The term“redundant” as used herein describes an element not needed for normaloperation of an integrated circuit after its fabrication is complete. Ofcourse, such “redundant” elements, when used temporarily to perform afunction during fabrication of the integrated circuit, are not redundantduring the fabrication process.

[0004] There is a continuing need for increased device density inintegrated circuits, including multi-layer integrated circuits and forefficient vertical interconnection structures within such multi-layerintegrated circuits.

BRIEF DESCRIPTION OF DRAWINGS

[0005] To clarify features and advantages of the invention, a detaileddescription of the invention will be rendered by reference to specificembodiments thereof, which are illustrated in the appended drawings. Thesame numbers are used throughout the drawings to refer to like featuresand components. It will be appreciated that these drawings depict onlytypical embodiments of the invention and are therefore not to beconsidered limiting of its scope. The invention will be described andexplained with additional specificity and detail through the use of theaccompanying drawings in which:

[0006]FIG. 1 shows a schematic diagram illustrating elements of amulti-level integrated circuit to which interconnection embodiments madein accordance with the invention may be applied.

[0007]FIG. 2A shows a top plan view illustrating verticalinterconnection embodiments made in accordance with the invention.

[0008]FIG. 2B shows a side elevation cross-sectional view illustratingvertical interconnection embodiments made in accordance with theinvention, corresponding to FIG. 2A.

[0009]FIG. 3 shows an electrical schematic diagram illustrating verticalinterconnection embodiments made in accordance with the invention.

[0010]FIG. 4 shows a flowchart illustrating a first method embodimentfor fabricating vertical interconnection structures in accordance withthe invention.

[0011]FIG. 5 shows a schematic diagram of a multi-level integratedcircuit embodiment made in accordance with the invention.

[0012]FIG. 6 shows a flowchart illustrating a second method embodimentfor fabricating vertical interconnection structures in accordance withthe invention.

[0013]FIG. 7 shows a schematic diagram illustrating elements of a memoryintegrated circuit made in accordance with the invention.

DETAILED DESCRIPTION OF EMBODIMENTS

[0014] For clarity of exposition, the drawings are not drawn to anyuniform scale. In particular, vertical and horizontal scales may bedifferent, and thus angles in the drawings may be smaller or larger thanthose in devices as actually fabricated.

[0015]FIG. 1 shows a schematic diagram illustrating elements of amulti-level integrated circuit 10 to which interconnection embodimentsmade in accordance with the invention may be applied. Integrated circuit10 has arrays of cells 20 arranged on planes 30 and 40. Individual cellsare addressed by row lines 50 and column lines 60. While FIG. 1 showstwo planes 30 and 40, it will be recognized that a multi-levelintegrated circuit 10 may consist of more than two planes and may havemany such planes. In practice, typically, the maximum number of planesis limited by practical considerations, such as the overhead circuitryassociated with each additional plane, the number of different masklevels required, and the number of process steps required (for example,to planarize each level).

[0016] Within each plane are in-plane conductors such as conductor 90 inplane 30 and conductor 100 in plane 40. Electrical connections made byconductors 90 and 100 are not shown in FIG. 1. Vertical interconnections80 connect conductors 90 on one plane (e.g., plane 30) to conductors 100on a different plane (e.g., plane 40), extending in this example atleast from plane 30 to plane 40. Planes 30 and 40 are normally formedsubstantially parallel to a base plane or substrate 70, such as asilicon wafer or glass or ceramic substrate, which may have aninsulating layer on its surface, if required. As shown in FIG. 1,vertical interconnections 80 may extend to substrate 70 and may beelectrically coupled to devices (not shown in FIG. 1) located onsubstrate 70.

[0017] Vertical interconnections, or “pillars,” are known in the art,not only in monolithic integrated circuits, but also in hybridintegrated circuits and multi-layer or “stacked” modules. Typically,such vertical interconnections are made by forming separate vias throughthe insulating layers between planes, filling such vias with conductivematerials, and stacking the vias to extend the vertical interconnectionto the required plane. When a layer of insulating material, such as anoxide, is used in fabrication of devices in a plane, typically thatinsulating material must be removed from the location of the vias inorder to provide continuity of the electrical connection through thestack of vias. Otherwise, the insulating layer would interrupt the DCelectrical continuity. This localized selective removal of an oxide orother insulating layer normally requires an etch process performedthrough a patterned mask layer so that the insulating material isremoved only over the vias and any other selected locations. Oneadvantage of the present invention over the prior art is that suchmasking and etch processes to remove an oxide layer are not needed.

[0018] In multi-level integrated circuit 10, row conductors and columnconductors form an orthogonal set of wiring channels. If integratedcircuit 10 is a memory, individual memory cells are addressed by acombination of a row conductor, e.g., a word line, and a columnconductor, e.g., a bit line. It will be recognized that other types ofintegrated circuits, such as field-programmable gate arrays (FPGA's)also require wiring channels to address their cells, such as theindividual gates of the gate array.

[0019] One aspect of the present invention is a vertical interconnectionstructure interconnecting first cells and a first conductor disposed ina first plane with at least second cells and a second conductor disposedin at least a second plane substantially parallel to the first plane,and including a vertical interconnection disposed for connecting thefirst conductor with the second conductor, the vertical interconnectionextending at least between the first and second planes and initiallyincluding an antifuse. This aspect is exemplified by various particularembodiments described next below.

[0020]FIGS. 2A and 2B respectively show a top plan view and acorresponding side-elevation cross-sectional view illustrating verticalinterconnection embodiments made in accordance with the invention. Apatterned conductor 110, connected to the tops of two via stacks 120, isshown in FIG. 2A. As shown in FIG. 2B, there are two stacks, each havingtwo individual conductive vias 160 vertically aligned and electricallycoupled with each other. The individual vias 160 are filled with a firstconductive material, which may be tungsten, for example. The two stacksextend downward from top conductor 110 on a first plane, at least to alower conductor 130 on a second plane below. Between the two individualvias 160 of each stack are two other layers, a conductor 151 coveredwith a thin insulating layer 152, which together form an antifuse 165 asdescribed in more detail below. Below the lower via 160 of each stack isanother thin insulating layer 155, which covers lower conductor 130,forming another antifuse 166. As shown in FIG. 2B, the via stacks may beextended below conductor 130 toward the top surface of a substrate 190.Optionally, separate bonding pads 170 and 180 may be provided at or nearsubstrate 190, allowing electrical contacts with higher voltage andcurrent capabilities, for faster fusing of antifuses 165 and 166.

[0021] An antifuse is an element whose resistance is normally high andwhose resistance switches to a low value when a suitable signal isapplied. Various antifuses are known in the art, being disclosed, forexample, in U.S. Pat. Nos. 5,821,558 and 6,111,302.

[0022] Shown in cross-section at the left side of FIG. 2B is anembodiment of a structure 150, which is a stack of two tunnel-junctionmemory cells. A tunnel-junction device has electrical characteristicssuch that, for linear increases in voltage, the tunnel junction exhibitsan exponential increase in current.

[0023] A memory cell utilizing a tunnel junction has an advantage inaccess speed over many other types of cells, since it is capable ofbeing accessed in a time of the order of a few nanoseconds or less.

[0024] Starting at the top of structure 150, there is a tunnel-junctiondiode 153, an antifuse 167 consisting of conductor 151 and thininsulating layer 152, another tunnel-junction diode 154, and anotherantifuse 168 consisting of conductor 130 and thin insulating layer 155.When a structure 150 is used, conductors 110 and 130 may be rowconductors, for example, and conductor 151 may be a column conductor,for example, for addressing the memory cells. (Although not shown assuch in the drawing, conductor 151 can extend in a direction in or outof the figure, orthogonally to conductors 110 and 130, for convenientuse as a column conductor.) As will become clear from the drawings andthe process descriptions below, memory-cell stack structure 150 isspecially adaptable for use with vertical interconnection structures 120embodying the present invention (and vice versa).

[0025] Thus, the vertical interconnection structure uses atunnel-junction antifuse oxide that can also be used as a portion ofeach functional cell in the integrated circuit. Conversely, when anintegrated circuit uses a cell, such as a memory cell, employing atunnel-junction antifuse oxide, that antifuse oxide can be furtherutilized in vertical interconnection structures, while avoiding maskpatterning, etching, and cleaning process steps that would otherwise benecessary.

[0026] Embodiments such as that shown in FIGS. 2A and 2B may be madeusing materials and processes of conventional semiconductor integratedcircuit fabrication, including patterning (by photolithography, forexample), and deposition of known substances.

[0027] Conductive elements such as row conductors 110 and 130 and columnconductor 151 may be formed by depositing and patterning a conductivematerial: aluminum, copper, copper-aluminum alloy, silicide, amorphoussilicon, microcrystalline silicon, or a refractory metal such astungsten or an alloy thereof. Such row and column conductors may have athickness in a typical range from about 20 nanometers (200 Angstroms) toabout 500 nanometers (5000 Angstroms), typically about 180 nanometers(1800 Angstroms).

[0028] Electrically insulating layers 115 may be composed, for example,of a material such as wet or dry silicon dioxide (SiO₂), a nitridematerial such as silicon nitride, tetraethylorthosilicate (TEOS) basedoxides, borophosphosilicate glass (BPSG), phosphosilicate glass (PSG),borosilicate glass (BSG), polyimide film, polyamide film, oxynitride,spun-on glass (SOG), a chemical vapor deposited (CVD) dielectricincluding a deposited oxide, a grown oxide, or similar dielectricmaterials. When composed of TEOS based oxides, insulating layer 115 canbe formed by a deposition resulting from the decomposition of a TEOS gasin a reactor.

[0029] Vias 160 may be filled with a refractory metal such as tungsten,for example, or an alloy thereof, e.g., with molybdenum.

[0030] The thin-insulator voltage-breakdown layer 152 or 155 may becomposed of an electrically insulating material such asoxide-nitride-oxide (ONO), tantalum pentoxide (Ta₂O₅), plasma-enhancedsilicon nitride, titanium oxide, germanium oxide, or achemical-vapor-deposited (CVD) dielectric including a deposited oxide, agrown oxide, or similar dielectric materials.

[0031] Embodiments of the integrated circuits using the verticalinterconnection structure of the invention are fabricated upon aconventional supporting structure 190 such as a flat siliconsemiconductor wafer substrate, which may have an insulating layer on itssurface if necessary. Alternatively, the substrate 190 may be made ofglass, gallium arsenide, silicon on sapphire (SOS), epitaxialformations, germanium, germanium silicon, diamond, silicon-on-insulator(SOI) material, selective implantation of oxygen (SIMOX) substrates,and/or like substrate materials.

[0032]FIG. 3 shows an electrical schematic illustrating verticalinterconnection embodiments made in accordance with the invention. Rowlines such as ROW 0 line 310 and ROW 1 line 320 and column lines such asCOL 1 line 330 perform their normal addressing functions in the arrays.Each pair comprised of a diode 360 and an antifuse 370 connectedtogether forms a cell such as cell 340 or 350. Antifuses 380 in thevertical interconnections complete the connection through verticalinterconnection stack 385 when and if each antifuse 380 is fused.Optionally, some or all vertical interconnections thus completed mayextend (390) to devices (not shown) at the base-level substrate 190.

[0033] As described hereinbelow, in the section titled “FabricationMethods,” some methods used in accordance with the invention employredundant column (or bit-line) vertical interconnects 391 and/orredundant row (or word-line) vertical interconnects 392, both shown inFIG. 3.

[0034] In use of the present invention, antifuses 165 and 166 (or 380)are formed initially in the vertical interconnection structures withinthe integrated circuit, and subsequently, selected antifuses among themare fused to prepare the integrated circuit for normal operation. Thoseantifuses which are not selected for fusing remain in place and do notcontribute to normal functioning of the integrated circuit unless theyare fused at some later time to provide additional verticalinterconnections.

[0035] Thus, an integrated circuit structure may be made having at leasttwo arrays of cells, with the arrays on parallel planes, and conductorson different planes being selectively interconnected by a verticalinterconnection structure as described hereinabove. For someapplications, the integrated circuit structure may have two to eightlayers, for example. Other embodiments of the structure may have fromeight to twelve layers. Unlike many other structures known in the art,which have an overhead cost associated with each layer and thus apractical economic limit to the number of layers, there is no knownlimit to the number of layers that can be accommodated in a structuremade in accordance with the present invention. Thus, there may be evenmore than twelve layers, the number of layers being essentiallyunlimited.

[0036] Specifically, a memory may be made with the memory cells or nodesaddressed by row and column lines selectively interconnected by such avertical interconnection structure, and a mass storage device may bemade from such memories. A description of fabrication methods follows,including embodiments of methods specially adapted for fabricatingvertical interconnection structures in accordance with the presentinvention.

[0037] Fabrication Methods

[0038] Overall fabrication methods suitable for making the presentinvention are described in commonly-owned U.S. patent application Ser.No. 10/001,740 filed October 31, 2001 and Ser. No. 10/116,213 filed Apr.2, 2002, the entire disclosure of each of which is incorporated hereinby reference. FIGS. 4 and 6 show flowcharts illustrating alternativemethod embodiments for fabricating particular vertical interconnectionstructures in accordance with the invention. Steps of the methods aredenoted by reference numerals S10, S20, . . . , and S150.

[0039] The flow chart of FIG. 4 illustrates a first method, utilizingredundant row and column conductors to fuse the vertical interconnectionantifuses. A redundant row conductor is provided (step S10) and aredundant column conductor is provided (step S20).

[0040]FIG. 5 shows a schematic diagram of a multi-level integratedcircuit embodiment made in accordance with the invention. The redundantrow conductor 81 provided in step S10 and the redundant column conductor82 provided in step S20 are both shown in FIG. 5. The redundantconductors 81 and 82 are made with sizes sufficient to carry the fusingcurrent needed to fuse the vertical interconnection junctions. While thelocations of the redundant row and column conductors are not critical tooperation of the invention, it is desirable to position the redundantconductors adjacent to the edges of the array near the row and columndrive circuitry (and in a memory integrated circuit near the readlogic), rather than inside the array, where they could otherwise reducearray density. Optionally, a bonding pad (not shown in FIG. 5) isprovided (step S30) for each redundant row and column conductor, toallow higher fusing current for faster fusing. Then each verticalinterconnection antifuse is fused in turn (step S40) using the redundantrow and column conductors, repeating this process for each selectedvertical interconnection to be completed.

[0041]FIG. 6 shows a flow chart illustrating a second method forfabricating a vertical interconnection structure in accordance with theinvention. The embodiment illustrated in FIG. 6 may be applied to arrayshaving, for example, n rows by m columns, i.e., an “n×m” array. Themethod illustrated in FIG. 6 utilizes the n by m array elementsthemselves to provide fusing current for fusing the verticalinterconnection antifuses. FIG. 7 shows a schematic diagram illustratingelements of a memory integrated circuit made in accordance with theinvention and using this method. In FIG. 7, diodes 360 and antifuses 370are normally connected between column line 330 and row lines 310 and320. The ellipses (rows of dots) in FIG. 7 denote the normal repetitionof that structure multiple times in a parallel fashion throughout theintegrated circuit arrays. In this embodiment, a stack of antifuses 380(shown at the right side of FIG. 7) is to be fused to connect row line320 to devices located at base substrate wafer 390, i.e., to devices 400and 420. A different stack of antifuses 385 is to be separately fused toconnect column line 330 to device 440 located at base substrate wafer390.

[0042] In the method illustrated in FIG. 6, an additional diode 450 isprovided (step S10) for each stack of vertical interconnectionantifuses. To fuse a row interconnect via stack, such as the stack ofantifuses 380 in FIG. 7, the selected row is activated (step S120) whileall columns are activated (step S130). This process is repeated for eachselected row interconnect via stack. To fuse a column interconnect viastack, such as the stack of antifuses 385 in FIG. 7, the selected columnis activated (step S140) while all rows are activated (step S150). Thisprocess is repeated for each selected column interconnect via stack. Inthis method, the fusing current is distributed through each of theparallel memory elements in a row or column.

INDUSTRIAL APPLICABILITY

[0043] The vertical interconnection structures of the invention and theinventive methods specially adapted for making and using them areespecially useful in semiconductor devices such as memory integratedcircuits. Integrated circuits of many types, including such integratedcircuit types as the memory embodiment example described above, may bemade with interconnection structures fabricated in accordance with theinvention. Such structures and integrated circuits employing them areuseful in apparatus such as mobile or stationary telephones, digitalcameras and camcorders, computing devices (such as desktop and portablecomputers, calculators, and personal digital assistants (PDA's) andtheir peripheral devices), media players such as players for CD's,DVD's, music, and video, and apparatus for printing, scanning, storing,copying, facsimile reproduction, and transmitting of documents. Thelatter apparatus may include multifunction devices.

[0044] Other embodiments of the invention will be apparent to thoseskilled in the art from a consideration of this specification or frompractice of the invention disclosed herein. For example, antifuses usedin the present invention may be fused by methods other than the methodsdescribed explicitly herein, such as by providing external probestemporarily for supplying fusing current to selected antifuses duringpreparation of the integrated circuits for normal use.

[0045] It is intended that the specification and examples disclosedherein be considered as exemplary only, with the true scope and spiritof the invention being defined by the following claims. Accordingly, thescope of the invention should be determined not by the embodimentsillustrated, but by the appended claims and their legal equivalents.

1 (cancelled).
 2. A method for fabricating integrated circuits of thetype having first cells and a first conductor disposed in a first plane,and at least second cells and a second conductor disposed in at least asecond plane substantially parallel to the first plane, said methodcomprising the steps of: a) forming a vertical interconnection disposedfor connecting said first conductor with said second conductor, saidvertical interconnection extending at least between said first andsecond planes and initially including an antifuse, and b) subsequentlyfusing said antifuse to form a continuous electrical connection forelectrically coupling said first conductor with at least said secondconductor.
 3. An integrated circuit fabricated by the method of claim 2.4-18 (Cancelled).
 19. A method for fabricating integrated circuits,comprising the steps of: a) disposing first cells and a first conductorin a first plane, b) disposing at least second cells and a secondconductor in at least a second plane substantially parallel to the firstplane, c) forming a vertical interconnection disposed for connectingsaid first conductor with said second conductor, said verticalinterconnection extending at least between said first and second planesand initially including an antifuse, and d) subsequently fusing saidantifuse to form a continuous electrical connection for electricallycoupling said first conductor with at least said second conductor. 20.An integrated circuit fabricated by the method of claim
 19. 21. Themethod of claim 19, wherein said vertical-interconnection forming step(c) is performed by a sub-method comprising the steps of: i) disposing asuitable thin oxide upon said first conductor, and ii) disposing aconductive via material upon said suitable thin oxide whereby atunnel-junction antifuse is formed.
 22. The method of claim 19, whereinsaid antifuse-fusing step (d) is performed by applying a voltage andcurrent sufficient to form a continuous electrical connection.
 23. Themethod of claim 19, wherein said antifuse-fusing step (d) is performedby applying a current through a conductor redundant to normal operationof said integrated circuits.
 24. The method of claim 19, wherein saidantifuse-fusing step (d) is performed by applying a current through adiode.
 25. A method for fabricating integrated circuits, comprising thesteps of: a) forming and disposing first cells and a first conductor ina first plane, b) forming and disposing at least second cells and asecond conductor in at least a second plane substantially parallel tothe first plane, c) forming a vertical interconnection disposed forconnecting said first conductor with said second conductor, saidvertical interconnection extending at least between said first andsecond planes and initially including an antifuse, said antifuse beingformed by substeps comprising: i) disposing a suitable thin oxide uponsaid first conductor, and ii) disposing a conductive via material uponsaid suitable thin oxide whereby a tunnel-junction antifuse is formed,and d) subsequently fusing said antifuse by applying a voltage andcurrent sufficient to form a continuous electrical connection forelectrically coupling said first conductor with at least said secondconductor.
 26. An integrated circuit fabricated by the method of claim25.
 27. The method of claim 25, wherein said antifuse-fusing step (d) isperformed by applying a current through a conductor redundant to normaloperation of said integrated circuits.
 28. An integrated circuitfabricated by the method of claim
 27. 29. The method of claim 25,wherein said antifuse-fusing step (d) is performed by applying a currentthrough a diode.
 30. An integrated circuit fabricated by the method ofclaim
 29. 31-53 (Cancelled).
 54. A method for fabricating integratedcircuits, said method comprising the steps of: a) disposing first cellsand a first conductor in a first plane, b) providing a multiplicity ofrow conductors and a multiplicity of column conductors, c) disposing atleast second cells and a second conductor in at least a second planesubstantially parallel to the first plane, at least one of said firstand second conductors being coupled to one of said multiplicity of rowconductors, d) forming a vertical interconnection disposed forconnecting said first conductor with said second conductor, saidvertical interconnection extending at least between said first andsecond planes and initially including an antifuse, and e) subsequentlyfusing said antifuse to form a continuous electrical connection forelectrically coupling said first conductor with at least said secondconductor by activating said one of said multiplicity of row conductorsand all of said multiplicity of column conductors.
 55. An integratedcircuit fabricated by the method of claim
 54. 56. The method of claim54, further comprising selectively repeating said fusing step (e) foreach selected row conductor of said multiplicity of row conductors. 57.An integrated circuit fabricated by the method of claim
 56. 58. A methodfor fabricating integrated circuits, said method comprising the stepsof: a) disposing first cells and a first conductor in a first plane, b)providing a multiplicity of row conductors and a multiplicity of columnconductors, c) disposing at least second cells and a second conductor inat least a second plane substantially parallel to the first plane, atleast one of said first and second conductors being coupled to one ofsaid multiplicity of column conductors, d) forming a verticalinterconnection disposed for connecting said first conductor with saidsecond conductor, said vertical interconnection extending at leastbetween said first and second planes and initially including anantifuse, and e) subsequently fusing said antifuse to form a continuouselectrical connection for electrically coupling said first conductorwith at least said second conductor by activating said one of saidmultiplicity of column conductors and all of said multiplicity of rowconductors.
 59. An integrated circuit fabricated by the method of claim58.
 60. The method of claim 58, further comprising selectively repeatingsaid fusing step (e) for each selected column conductor of saidmultiplicity of column conductors.
 61. An integrated circuit fabricatedby the method of claim
 60. 62. A method for fabricating integratedcircuits, comprising the steps of: a) disposing first cells and a firstconductor in a first plane, b) providing at least one redundant rowconductor and at least one redundant column conductor, c) disposing atleast second cells and a second conductor in at least a second planesubstantially parallel to the first plane, d) forming a verticalinterconnection disposed for connecting said first conductor with saidsecond conductor, said vertical interconnection extending at leastbetween said first and second planes and initially including anantifuse, and e) subsequently fusing said antifuse by supplying to atleast one of said at least one redundant row conductor and said at leastone redundant column conductor sufficient voltage and current to form acontinuous electrical connection for electrically coupling said firstconductor with at least said second conductor.
 63. An integrated circuitfabricated by the method of claim
 62. 64. The method of claim 62,further comprising selectively repeating said fusing step (e) for eachselected vertical interconnection.
 65. An integrated circuit fabricatedby the method of claim
 64. 66. The method of claim 62, wherein saidfirst and second cells are each disposed in arrays having array edges,further comprising the step of disposing said at least one redundant rowconductor and at least one redundant column conductor adjacent to saidarray edges of said arrays.
 67. An integrated circuit fabricated by themethod of claim 66.